"Cubic Limit" (1974) by Manfred Mohr

During my one-man show at the Museum of Modern Art in Paris in 1971, I met the CEO of C.G.M (La Companie Generale de Micromatique), a data storage and preservation company, which specialized in micro films. He invited me to experiment on their brand new machine DATAGRAPHIX 4460 to make computer animations. I gladly accepted and during the next 4 years I made several short computer films. It was a very painful experience since the process was very slow and the turnover dragged out over many months.
Article citing Manfred Mohr's use of the Datagraphix machine, 1973

For the film, each frame was drawn with a light beam on a small high resolution screen with an attached camera which automatically photographed each frame onto celluloid film. This film was then transfered through a contact copy onto 16mm film to create the animations.

Artist website.